III-V processing

Intergrated circuit

The class 100 III-V integrated circuit laboratory houses equipments for the fabrication of ultra fast transistors, optical devices ( high efficiency Solar cells) and high sensitivity magnetic sensors. The complexity ranges from single devices with sizes in the nm range to complete integrated circuits on chip sizes 4x4 mm^2”.

  • III-V Integrated circuit Lab
    • 6" Deep UV Lithography (0.5 μm)
    • Reflow technology (0.2 μm)
    • RIE
    • Dielectric Deposition
    • Metal Deposition
    • 6" furnaces
    • In situ electrical characterisation


  • Mdelling Software
    • SILVACO (Physical)
    • aADS

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